Inductively coupled plasma

Inductively coupled plasma

An inductively coupled plasma (ICP) is a type of plasma source in which the energy is supplied by electrical currents which are produced by electromagnetic induction, that is, by time-varying magnetic fields. [A. Montaser and D. W. Golightly, eds. Inductively Coupled Plasmas in Analytical Atomic Spectrometry, VCH Publishers, Inc., New York, 1992.]

Operation

There are two types of ICP geometries: planar and cylindrical. In planar geometry, the electrode is a coil of flat metal wound like a spiral. In cylindrical geometry, it is like a helical spring.

When a time-varying electric current is passed through the coil, it creates a time varying magnetic field around it, which in turn induces azimuthal electric currents in the rarefied gas, leading to break down and formation of a plasma. Argon is one example of a commonly used rarefied gas.

Plasma temperatures can range between 6 000 K and 10 000 K, comparable to the surface of the sun.

ICP discharges are of relatively high electron density, on the order of 1015 cm-3.

As a result, ICP discharges have wide applications where a high density plasma is necessary. Another benefit of ICP discharges is that they are relatively free of contamination because the electrodes are completely outside the reaction chamber. In a capacitively coupled plasma (CCP), in contrast, the electrodes are often placed inside the reactor and are thus exposed to the plasma and subsequent reactive chemical species.

Applications

* ICP-AES, a type of atomic emission spectrometry
* ICP-MS, a type of mass spectrometry.
* ICP-RIE, a type of reactive ion etching.

ee also

*Pulsed inductive thruster

References

External links

* [http://www.cee.vt.edu/ewr/environmental/teach/smprimer/icp/icp.html Inductively Coupled Plasma by Traci Bradford and M. Nicole Cook]
* [http://www.jobinyvon.com/Emission/Principle Principle of Atomic Emission]


Wikimedia Foundation. 2010.

Игры ⚽ Поможем решить контрольную работу

Look at other dictionaries:

  • Inductively coupled plasma mass spectrometry — ICP MS Instrument Acronym ICP MS Classification Mass spectrometry Analytes atomic and polyatomic species in plasma, with exceptions; usually inte …   Wikipedia

  • Inductively coupled plasma atomic emission spectroscopy — (ICP AES), also referred to as inductively coupled plasma optical emission spectrometry (ICP OES), is an analytical technique used for the detection of trace metals. It is a type of emission spectroscopy that uses the inductively coupled plasma… …   Wikipedia

  • Inductively Coupled Plasma Emission Spectrometry — Inductively Coupled Plasma Emission SpectrometryA test method of quantitative identification of the elements, Aluminium, Silicon, Sodium, Vanadium, Nickel, Iron, Calcium, Zinc and Phosphorus in residual fuel oils.A weighted test sample is… …   Wikipedia

  • Capacitively coupled plasma — A capacitively coupled plasma (CCP) is one of the most common types of industrial plasma sources. It essentially consists of two metal electrodes separated by a small distance, placed in a reactor. The gas pressure in the reactor can be lower… …   Wikipedia

  • Plasma source — Plasma sources generate plasmas. Excitation of a plasma requires partial ionization of neutral atoms and/or molecules of a medium. There are several ways to cause ionization:collisions of energetic particles, strong electric fields acting on bond …   Wikipedia

  • Plasma-immersion ion implantation — (PIII) [cite book | title = Materials Science of Thin Films | author = Milton Ohring | publisher = Academic Press | year = 2002 | isbn = 0125249756 | url = http://books.google.com/books?id=SOt yFjV xwC pg=PA267… …   Wikipedia

  • Plasma-Physik — Plasma in einer Plasmalampe. Datei:Gerds plasma.jpg magnetisch verformtes Plasma Sonne …   Deutsch Wikipedia

  • Plasma (Physik) — Plasma in einer Plasmalampe Magnetisch verformtes Plasma …   Deutsch Wikipedia

  • Plasma (physics) — For other uses, see Plasma. Plasma lamp, illustrating some of the more complex phenomena of a plasma, including filamentation. The colors are a result of relaxation of electrons in excited states to lower energy states after they have recombined… …   Wikipedia

  • Massenspektrometrie mit induktiv gekoppeltem Plasma — Schemazeichnung Massenspektrometrie mit induktiv gekoppeltem Plasma (englisch inductively coupled plasma mass spectrometry, ICP MS) ist eine robuste, sehr empfindliche massenspektrometrische Analysenmethode in der anorganischen… …   Deutsch Wikipedia

Share the article and excerpts

Direct link
Do a right-click on the link above
and select “Copy Link”